Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Deposition
نویسندگان
چکیده
منابع مشابه
Atomic Layer Deposition of Noble Metal Thin Films
3 Preface 4 List of publications 5 List of symbols and abbreviations 6
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ژورنال
عنوان ژورنال: Angewandte Chemie
سال: 2018
ISSN: 0044-8249
DOI: 10.1002/ange.201806985